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The Brooks Instrument GF125C-905363 (GF125CXXC) is a high-performance mass flow controller (MFC) from the GF Series, designed for precise and reliable gas flow control in demanding industrial and research applications. This model is particularly suited for ultra-high-purity (UHP) environments, making it a popular choice for semiconductor and advanced manufacturing industries.
Key Features :
1. Ultra-High Purity (UHP) Design: Built with materials and processes that meet stringent cleanliness requirements for semiconductor and other critical industries.
2. High Accuracy and Stability: Provides precise and repeatable gas flow control, critical for maintaining process consistency.
3. Wide Flow Range: Offers flexibility to support a variety of process conditions and gases.
4. Fast Response Time: Enables quick adjustments to flow changes, ensuring process efficiency.
5. Multi-Gas and Multi-Range Capability: Configurable for different gases and flow ranges, reducing the need for multiple MFC models.
6. Digital and Analog Communication: Compatible with modern control systems via advanced digital protocols, while still supporting legacy analog signals.
Key Functional Applications
1. Semiconductor Manufacturing:
• Used in processes like chemical vapor deposition (CVD), atomic layer deposition (ALD), and etching, where precise gas flow is crucial for layer uniformity and device performance.
2. Flat Panel Display Production: Provides accurate gas flow control for thin-film deposition techniques like plasma-enhanced chemical vapor deposition (PECVD).
3. Solar Cell Manufacturing: Ensures precise delivery of process gases for photovoltaic cell production, improving efficiency and output quality.
4. LED Manufacturing: Supports processes like metal-organic chemical vapor deposition (MOCVD) for producing high-quality LEDs.
5. R&D Laboratories: Ideal for experimental setups requiring precise and reliable gas flow control for testing and process development.
6. Specialty Gas Delivery Systems: Ensures stability and accuracy in the delivery of high-purity gasesfor critical applications.
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