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Maquina De Recubrimiento A El Vacio Para Joyera PVD Maquina
WORKING PRINCIPLE:
Technical Spcifications |
Mode | SA-800 | SA-1000 | SA-1200 | SA-1600 |
Dimension | D700*H800mm | D1000*H1100mm | D1200*H1400mm | D1600*H2000m |
Arc source quantity | 6 pcs | 12pcs | 14pcs | 24pcs |
Sputtering | DC or MF sputtering | |||
Sputtering | ≥1 set | |||
Arc Power source | Arc power source, Pulsed bias power supply | |||
Reactive gas control | Mass flowmeter + Electromagnetic valve | |||
Vacuum chamber structure | Vertical chamber front opening door, double layer cooling chamber, SUS304 | |||
Pumping system | Diffusion pump(Turbo Molecular pumps) +Roots pump +Mechanical pump | |||
the ultimate vacuum can reach up to (5.0*10-4Pa) | ||||
Heating Temperature control | Normal temperature to 150~500 centigrade PID control, radiation heating. | |||
Vacuum degree measuring | Digital display composite vacuum gauge: from atmosphere to 1.0*10-5Pa | |||
Control mode | Manual/Automatic work mode by PLC touched screen | |||
Compressed Air | 5 ~ 8Kgf/cm2 | |||
Cooling Water | 2.5 ~ 3Kgf/cm2, 18 ~ 25°C, Distilled Water | |||
Process Gas | 99.999% Pure Gas | |||
Heating Control | Selecting the capacity according to the choice of user, PID control | |||
System Ground | Class-1 grounding or its relevant facility | |||
Remarks | All the specifications can be customized according to your requests. |
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